SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Multilevel Interconnect Technology - Integrated arc suppression unit for defect reduction in PVD applications
Li, Jason, Narasimhan, Murali K., Pavate, Vikram, Loo, David, Rosenblum, Steve, Trubell, Larry, Scholl, Richard, Seamons, Scott, Hagerty, Chris, Ramaswami, Sesh, Patel, Divyesh N., Graef, MartVolume:
3214
Year:
1997
Language:
english
DOI:
10.1117/12.284662
File:
PDF, 547 KB
english, 1997