SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Properties of polycrystalline diamond as x-ray mask
Sheu, Jeng Tzong, Yang, G. Y., Huang, B. R., Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Year:
1998
Language:
english
DOI:
10.1117/12.324054
File:
PDF, 947 KB
english, 1998