SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] Materials Research in Low Gravity II - Control and homogenization of oxygen distribution in Si crystals by the novel technique: electromagnetic Czochralski method (EMCZ)
Watanabe, Masahito, Eguchi, Minoru, Hibiya, Taketoshi, Ramachandran, NarayananVolume:
3792
Year:
1999
Language:
english
DOI:
10.1117/12.351292
File:
PDF, 380 KB
english, 1999