SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Materials and Device Characterization in Micromachining II - Some aspects on the mechanical analysis of microshutters
Fettig, Rainer K., Kuhn, Jonathan L., Moseley, Jr., Samuel H., Kutyrev, Alexander S., Orloff, Jon, Lu, Shude D., Vladimirsky, Yuli, Friedrich, Craig R.Volume:
3875
Year:
1999
Language:
english
DOI:
10.1117/12.360473
File:
PDF, 2.22 MB
english, 1999