SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V - Combine technique of conducting materials testing at high pressures
Shchennikov, Vladimir V., Derevskov, Andrew Y., Osotov, Vladimir I., Toprac, Anthony J., Dang, KimVolume:
3882
Year:
1999
Language:
english
DOI:
10.1117/12.361316
File:
PDF, 859 KB
english, 1999