SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Micromachining and Microfabrication Process Technology and Devices - Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results
Ding, Guifu, Zhang, Yi, Yang, Chunsheng, Zhao, Xiaolin, Yu, Aibin, Shen, Tianhui, Tien, Norman C., Huang, Qing-AnVolume:
4601
Year:
2001
Language:
english
DOI:
10.1117/12.444707
File:
PDF, 118 KB
english, 2001