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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Electronics and Structures for MEMS II - Influence of initial curvature on micromachined thermal bimorph actuation
Hsu, Chengpeng, Hsu, Wensyang, Bergmann, Neil W., Abbott, Derek, Hariz, Alex, Varadan, Vijay K.Volume:
4591
Year:
2001
Language:
english
DOI:
10.1117/12.449160
File:
PDF, 173 KB
english, 2001