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SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - Hole drilling of glass-foam substrates with laser
Yoshida, Yoshikazu, Yajima, Hiroyoshi, Hashidate, Yuji, Ogura, Hiroshi, Ueda, Shuhei, Miyamoto, Isamu, Lu, Yong Feng, Sugioka, Koji, Dubowski, Jan J.Volume:
4426
Year:
2002
Language:
english
DOI:
10.1117/12.456803
File:
PDF, 893 KB
english, 2002