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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - High-aspect ratio microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching
Katoh, Takanori, Sato, Yasunori, Yamaguchi, Daichi, Ikeda, Shigetoshi, Aoki, Yasushi, Oshima, Ahihiro, Washio, Masakazu, Tabata, Yoneho, Yasaitis, John A., Perez-Maher, Mary Ann, Karam, Jean MichelVolume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.472802
File:
PDF, 180 KB
english, 2003