![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Novel through-die connections for MEMS applications
Kommera, Swaroop, Woods, Wayne, Krusius, J. Peter, Yasaitis, John A., Perez-Maher, Mary Ann, Karam, Jean MichelVolume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.472804
File:
PDF, 649 KB
english, 2003