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SPIE Proceedings [SPIE SPIE's 9th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 17 March 2002)] Smart Structures and Materials 2002: Smart Structures and Integrated Systems - Feasibility study of PZT thin-film sensors and actuators for smart microstructures and MEMS devices
Hsu, Yi-Chu, Shen, I. Y., Cao, G. Z., Davis, L. PorterVolume:
4701
Year:
2002
Language:
english
DOI:
10.1117/12.474676
File:
PDF, 344 KB
english, 2002