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SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Advanced Process Control and Automation - Optimal model-predictive control of overlay lithography implemented in an ASIC fab
Middlebrooks, Scott A., Hankinson, Matt, Ausschnitt, Christopher P.Volume:
5044
Year:
2003
Language:
english
DOI:
10.1117/12.485303
File:
PDF, 542 KB
english, 2003