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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Microfluidics, BioMEMS, and Medical Microsystems - Low-voltage-driven miniaturized pump with high back pressure
Liu, Chengxun, Guo, Min, Chen, Xiaofang, Cheng, Jing, Becker, Holger, Woias, PeterVolume:
4982
Year:
2003
Language:
english
DOI:
10.1117/12.488155
File:
PDF, 180 KB
english, 2003