SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - RF MEMS capacitive switch with isolation valley at lower frequency band
won Jung, Chang, Varadan, Vijay K., Ghodsian, Bahram, Cetiner, Bedri A., De Flaviis, FrancoVolume:
5389
Year:
2004
Language:
english
DOI:
10.1117/12.540227
File:
PDF, 303 KB
english, 2004