SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
Braun, Stefan, Bendjus, Beatrice, Foltyn, Thomas, Menzel, Maik, Schreiber, Jurgen, Leson, Andreas, Khounsary, Ali M., Dinger, Udo, Ota, KazuyaVolume:
5533
Year:
2004
Language:
english
DOI:
10.1117/12.560358
File:
PDF, 803 KB
english, 2004