SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - The microfabrication using powder materials with excimer laser
Chen, Jimin, Yue, Canfu, Zhang, Yu, Wang, Xubao, Zuo, Tiechuan, Ma, Zhichun, Jin, Guofan, Chen, XuyuanVolume:
5641
Year:
2004
Language:
english
DOI:
10.1117/12.570167
File:
PDF, 384 KB
english, 2004