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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Flatness nanometrology of large optically rough areas
Timcu, Adrian, Apostol, Dan, Damian, Victor S., Nascov, Victor, Iordache, Iuliana, Muller, Raluca, Vlad, Valentin I.Year:
2012
Language:
english
DOI:
10.1117/12.583081
File:
PDF, 451 KB
english, 2012