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SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Advances in Resist Technology and Processing IX - Effects of polymer end groups on chemical amplification
Ito, Hiroshi, England, William P., Lundmark, Stephen B., Novembre, Anthony E.Volume:
1672
Year:
1992
Language:
english
DOI:
10.1117/12.59721
File:
PDF, 1.18 MB
english, 1992