SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Integrated Circuit Metrology, Inspection, and Process Control VI - Achieving linearity for dense CD measurements with confocal metrology
Kaack, Torsten R., Hannemann-Mantalas, Lynda C., Piwonka-Corle, Timothy R., Postek, Jr., Michael T.Volume:
1673
Year:
1992
Language:
english
DOI:
10.1117/12.59824
File:
PDF, 437 KB
english, 1992