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SPIE Proceedings [SPIE Nondestructive Evaulation for Health Monitoring and Diagnostics - San Diego, CA (Sunday 6 March 2005)] Testing, Reliability, and Application of Micro- and Nano-Material Systems III - Self-regulating charge control for ultra high resolution scanning electron microscopy (Invited Paper)
Geer, Robert E., Toth, Milos, Thiel, Brad L., Meyendorf, Norbert, Baaklini, George Y., Knowles, William R., Michel, BerndVolume:
5766
Year:
2005
Language:
english
DOI:
10.1117/12.603070
File:
PDF, 8.21 MB
english, 2005