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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Failure analysis of MEMS RF cantilevered beam switch
Guo, Fangmin, Xu, Xin, Li, Chengshi, Ge, Yuping, Yu, Jianguo, Xin, Peisheng, Zhu, Rongjin, Lai, Zongshen, Zhu, Ziqiang, Lu, Wei, Chu, Junhao, Lai, Zongsheng, Wang, Lianwei, Xu, ShaohuiYear:
2012
Language:
english
DOI:
10.1117/12.607393
File:
PDF, 245 KB
english, 2012