SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - High-temperature multilayers
Yulin, Sergiy, Mackay, R. Scott, Benoit, Nicolas, Feigl, Torsten, Kaiser, NorbertVolume:
5751
Year:
2005
Language:
english
DOI:
10.1117/12.617535
File:
PDF, 770 KB
english, 2005