SPIE Proceedings [SPIE 21st European Mask and Lithography Conference - Dresden, Germany (Thursday 16 June 2005)] 21st European Mask and Lithography Conference - Application of PGSD (proximity gap suction development) to 70 nm NAND mask fabrication
Sakurai, Hideaki, Shibata, Tooru, Itoh, Masamitsu, Ooishi, Kotaro, Funakoshi, Hideo, Okamoto, Yoshiki, Oono, Shigemi, Kaneda, Masatoshi, Kamei, Shigenori, Hayashi, NaoyaVolume:
5835
Year:
2005
Language:
english
DOI:
10.1117/12.637275
File:
PDF, 453 KB
english, 2005