SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - Failure mechanisms of DC and capacitive RF MEMS switches
Patton, Steven T., Zabinski, Jeffrey S., Tanner, Danelle M., Ramesham, RajeshuniVolume:
6111
Year:
2006
Language:
english
DOI:
10.1117/12.644162
File:
PDF, 521 KB
english, 2006