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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 26 February 2006)] Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems - Comparative analysis of distributed mass micromachined gyroscopes fabricated in SCS-SOI and EFAB
Trusov, Alexander, Tomizuka, Masayoshi, Yun, Chung-Bang, Acar, Cenk, Shkel, Andrei M., Giurgiutiu, VictorVolume:
6174
Year:
2006
Language:
english
DOI:
10.1117/12.658932
File:
PDF, 1.96 MB
english, 2006