SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Excimer laser micromachining
Lapshin, Konstantin E., Obidin, Alexey Z., Vartapetov, Sergey K., Dumitras, Dan C., Dinescu, Maria, Konov, Vitally I.Year:
2012
Language:
english
DOI:
10.1117/12.729649
File:
PDF, 606 KB
english, 2012