SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - OPC development in action for advanced technology nodes
Wang, Anthony Chunqing, Naber, Robert J., Kawahira, Hiroichi, Fujimoto, Masashi, van Adrichem, Paul J. M., Bork, Ingo, Yamashita, HiroshiVolume:
6730
Year:
2007
Language:
english
DOI:
10.1117/12.746838
File:
PDF, 427 KB
english, 2007