SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] Quantum Optics, Optical Data Storage, and Advanced Microlithography - Lithography options for the 32nm half pitch node and their implications on resist and material technology
Guo, Guangcan, Gronheid, Roel, Hendrickx, Eric, Liu, Songhao, Jin, Guofan, Wiaux, Vincent, Maenhoudt, Mireille, Schouhamer Immink, Kees A., Shono, Keiji, Goethals, Mieke, Vandenberghe, Geert, Mack, ChVolume:
6827
Year:
2007
Language:
english
DOI:
10.1117/12.779273
File:
PDF, 883 KB
english, 2007