SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] MEMS, MOEMS, and Micromachining III - Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates
Schmidt, Jan-Uwe, Urey, Hakan, Friedrichs, Martin, Bakke, Thor, Voelker, Benjamin, Rudloff, Dirk, Lakner, HubertVolume:
6993
Year:
2008
Language:
english
DOI:
10.1117/12.787015
File:
PDF, 1.10 MB
english, 2008