SPIE Proceedings [SPIE Smart Materials, Nano-and Micro-Smart Systems - Melbourne, Australia (Tuesday 9 December 2008)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV - MEMS product engineering using fabrication process development tools
Hahn, K., Chiao, Jung-Chih, Hariz, Alex J., Schmidt, T., Ortloff, D., Thiel, David V., Yang, Changyi, Popp, J., Wagener, A., Brück, R.Volume:
7269
Year:
2008
Language:
english
DOI:
10.1117/12.807705
File:
PDF, 1.29 MB
english, 2008