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SPIE Proceedings [SPIE Fourth International Symposium on Precision Mechanical Measurements - Anhui, China (Monday 25 August 2008)] Fourth International Symposium on Precision Mechanical Measurements - Process monitoring for micro-fabrication based on machine vision
Gao, Guohua, Fei, Yetai, Fan, Kuang-Chao, Zhang, Hongguang, Zhao, Jing, Lu, Rongsheng, Zhu, Yu, Duan, GuanghongVolume:
7130
Year:
2008
Language:
english
DOI:
10.1117/12.819569
File:
PDF, 456 KB
english, 2008