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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Alternative Lithographic Technologies III - Solid-immersion Lloyd's mirror as a testbed for plasmon-enhanced high-NA lithography
Mehrotra, Prateek, Herr, Daniel J. C., Holzwarth, Charles W., Blaikie, Richard J.Volume:
7970
Year:
2011
Language:
english
DOI:
10.1117/12.879121
File:
PDF, 628 KB
english, 2011