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SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Advances in Optical Thin Films IV - Aluminum based multilayers systems synthesized by ion beam sputtering for extreme UV
Ziani, A., Lequime, Michel, Macleod, H. Angus, Delmotte, F., Le Paven-Thivet, C., Ristau, Detlev, Meltchakov, E., Bridou, F., Jérome, A., Roulliay, M., Gasc, K.Volume:
8168
Year:
2011
Language:
english
DOI:
10.1117/12.896433
File:
PDF, 273 KB
english, 2011