SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Alternative Lithographic Technologies IV - Self-consistent field theory of directed self-assembly in laterally confined lamellae-forming diblock copolymers
Laachi, Nabil, Takahashi, Hassei, Delaney, Kris T., Hur, Su-Mi, Shykind, David, Weinheimer, Corey J., Fredrickson, Glenn H., Tong, William M.Volume:
8323
Year:
2012
Language:
english
DOI:
10.1117/12.916577
File:
PDF, 370 KB
english, 2012