SPIE Proceedings [SPIE Interferometry '89 - Warsaw, Poland...

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SPIE Proceedings [SPIE Interferometry '89 - Warsaw, Poland (Monday 8 May 1989)] Interferometry '89 - Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics

Petra, F., Popela, B., Stejskal, A., Krsek, J., Vesela, Z., Jakl, M., Petra, F., Popela, B., Stejskal, A., Krsek, J., Vesela, Z., Jakl, M., Jaroszewicz, Zbigniew, Pluta, Maksymilian, Jaroszewicz, Zbig
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Volume:
1121
Year:
1990
Language:
english
DOI:
10.1117/12.961280
File:
PDF, 11.33 MB
english, 1990
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