![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE 1989 Intl Congress on Optical Science and Engineering - Paris, France (Monday 24 April 1989)] Thin Films in Optics - Investigation Of Wide-Range Stylus Profilometry
Player, Michael A., Henry, David M., Tschudi, Theo T.Volume:
1125
Year:
1990
Language:
english
DOI:
10.1117/12.961366
File:
PDF, 203 KB
english, 1990