SPIE Proceedings [SPIE 1986 Microlithography Conferences - Santa Clara (Monday 10 March 1986)] Optical Microlithography V - Two-Dimensional Optical Proximity Effects
Flanner III, Philip D., Subramanian, Shankar, Neureuther, Andrew R., Stover, Harry L.Volume:
633
Year:
1986
Language:
english
DOI:
10.1117/12.963727
File:
PDF, 2.57 MB
english, 1986