High-Performance Bottom-Gate Poly-Si...

High-Performance Bottom-Gate Poly-Si Polysilicon–Oxide–Nitride–Oxide–Silicon Thin Film Transistors Crystallized by Excimer Laser Irradiation for Two-Bit Nonvolatile Memory Applications

Lee, I-Che, Kuo, Hsu-Hang, Tsai, Chun-Chien, Wang, Chao-Lung, Yang, Po-Yu, Wang, Jyh-Liang, Cheng, Huang-Chung
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Volume:
12
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2012.6245
Date:
July, 2012
File:
PDF, 1.00 MB
english, 2012
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