Application of Thermal Initiator for Characteristic Improvements of Polymeric Replica Mold for UV Nanoimprint Lithography
Jeong, Ye-Sul, Park, Jaehoon, Lee, Bong Kuk, Ryu, Jin-Hwa, Baek, Kyu-Ha, Do, Lee-MiVolume:
14
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2014.8800
Date:
August, 2014
File:
PDF, 2.75 MB
english, 2014