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[IEEE 2014 International Conference on Planarization/CMP Technology (ICPT) - Kobe, Japan (2014.11.19-2014.11.21)] Proceedings of International Conference on Planarization/CMP Technology 2014 - Dummy design characterization for STI CMP with fixed abrasive

Tsvetanova, Diana, Devriendt, Katia, Ong, Patrick, Vandeweyer, Tom, Delande, Tinne, Chew, Soon Aik, Horiguchi, Naoto, Struyf, Herbert
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Year:
2014
DOI:
10.1109/icpt.2014.7017279
File:
PDF, 134 KB
2014
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