![](/img/cover-not-exists.png)
[IEEE 2014 International Conference on Planarization/CMP Technology (ICPT) - Kobe, Japan (2014.11.19-2014.11.21)] Proceedings of International Conference on Planarization/CMP Technology 2014 - Dummy design characterization for STI CMP with fixed abrasive
Tsvetanova, Diana, Devriendt, Katia, Ong, Patrick, Vandeweyer, Tom, Delande, Tinne, Chew, Soon Aik, Horiguchi, Naoto, Struyf, HerbertYear:
2014
DOI:
10.1109/icpt.2014.7017279
File:
PDF, 134 KB
2014