SPIE Proceedings [SPIE Semiconductors '92 - Somerset, NJ (Sunday 22 March 1992)] Advanced Semiconductor Epitaxial Growth Processes and Lateral and Vertical Fabrication - Vapor transport epitaxy: an advanced growth process for III-V and II-VI semiconductors
Gurary, Alexander, Tompa, Gary S., Nelson, Craig R., Stall, Richard A., Lu, Yicheng, Liang, Shaohua, Malik, Roger J., Palmstrom, Chris J., Bedair, Salah M., Craighead, Harold G., Kubena, Randall L.Volume:
1676
Year:
1992
Language:
english
DOI:
10.1117/12.137640
File:
PDF, 561 KB
english, 1992