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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Manufacturing Process Control for Microelectronic Devices and Circuits - CHARM-2: a new tool for characterization of wafer charging in ion- and plasma-based IC processing equipment
Lukaszek, Wes A., Reedholm, Sr., Joseph, Current, Michael I., Tripsas, Nick, Sabnis, Anant G.Volume:
2336
Year:
1994
Language:
english
DOI:
10.1117/12.186791
File:
PDF, 655 KB
english, 1994