SPIE Proceedings [SPIE Photonics for Industrial Applications - Boston, MA (Monday 31 October 1994)] Industrial Optical Sensors for Metrology and Inspection - Multi-electrode circular position-sensitive device (PSD) and its application to angular measurement
Nakajima, Hajime, Shikai, Masahiro, Takashima, Kazuo, Usami, Teruo, Harding, Kevin G., Stahl, H. PhilipVolume:
2349
Year:
1995
Language:
english
DOI:
10.1117/12.198699
File:
PDF, 358 KB
english, 1995