![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Simulation and optimization of the magnetic field in an electroplated copper micro-coil
Matar, Maher, Al-Halhouli, Alaaldeen T., Büttgenbach, Stephanus, Dietzel, Andreas H., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2018216
File:
PDF, 575 KB
english, 2013