SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - New system for fast submicron laser direct writing
Kueck, Heinz, Bollerott, Michael, Doleschal, Wolfgang, Gehner, Andreas, Grundke, Wolfram, Kunze, Detlef, Melcher, Rolf, Paufler, Joerg, Seltmann, Rolf, Zimmer, Guenter, Brunner, Timothy A.Volume:
2440
Year:
1995
Language:
english
DOI:
10.1117/12.209280
File:
PDF, 583 KB
english, 1995