SPIE Proceedings [SPIE SPIE Commercial + Scientific Sensing and Imaging - Baltimore, Maryland, United States (Sunday 17 April 2016)] Dimensional Optical Metrology and Inspection for Practical Applications V - Fiber faceplate modulation readout in Bi-material micro-cantilever mirror array imaging system
Harding, Kevin G., Zhang, Song, Hui, Mei, Xia, Zhengzheng, Liu, Ming, Dong, Liquan, Liu, Xiaohua, Zhao, YuejinVolume:
9868
Year:
2016
Language:
english
DOI:
10.1117/12.2222162
File:
PDF, 892 KB
english, 2016