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SPIE Proceedings [SPIE 15th Annual BACUS Symposium on Photomask Technology and Management '95 - Santa Clara, CA (Wednesday 20 September 1995)] 15th Annual BACUS Symposium on Photomask Technology and Management - Fabrication processes for SCALPEL mask blanks
Huggins, Harold A., Bolan, Kevin J., Liddle, James A., Peabody, Jr., Milton L., Tarascon-Auriol, Regine G., Windt, David L., Shelden, Gilbert V., Wiley, James N.Volume:
2621
Year:
1995
Language:
english
DOI:
10.1117/12.228176
File:
PDF, 290 KB
english, 1995