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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - LIGA-based family of tips for scanning probe applications
Akkaraju, Sandeep, Desta, Yohannes M., Li, BenQiang, Murphy, Michael C., Vladimirsky, Olga, Vladimirsky, Yuli, Postek, Jr., Michael T., Friedrich, Craig R.Volume:
2880
Year:
1996
Language:
english
DOI:
10.1117/12.250951
File:
PDF, 676 KB
english, 1996