SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - New array lens optical system for large-area micromachining lithography
Wang, Lawrence C., Markle, David A., Ellis, Raymond J., Jeong, Hwan J., Postek, Jr., Michael T., Friedrich, Craig R.Volume:
2880
Year:
1996
Language:
english
DOI:
10.1117/12.250964
File:
PDF, 986 KB
english, 1996