SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Release-etch modeling for complex surface-micromachined structures

Eaton, William P., Smith, James H., Jarecki, Robert L., Pang, Stella W., Chang, Shih-Chia
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Volume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251224
File:
PDF, 640 KB
english, 1996
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